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E系列为电子冷热器,用于工艺化学液或DI水的闭路、高精度控温循环系统,加热或冷却特定的化学液或DI水。性能稳定可靠,工作时无噪音。内部采用PFA盘管作为热交换器,具有高度的洁净性。 The E Series Semiconductor Heat Exchanger is a closed-loop heat exchanger system, used for controlling precision process temperature. It has high stability, reliability, purity, working without noise. 详情见